A Study of VLSI Technology, Wafers and Impact on Nanotechnology

摘要

This paper presents a detailed study of the present VLSI technologicalaspects, importance and their replacement or combination with theNanotechnology in the VLSI world of silicon semiconductors. Here authors bringout the nanotechnology in Silicon world which invariably means shrinkinggeometry of CMOS devices to nano scale. This also refers to a new world ofnanotechnology where chemists are working in manufacturing of carbon nanotubes, nano devices of varius materials of nano dimensions without even knowing howthis could change the whole world of Si and CMOS technology and the world welive in.